射频磁控溅射沉积高质量ZnO薄膜的工艺条件(修改稿)
李伙全;曾祥华;韩玖荣
射频磁控溅射沉积高质量ZnO薄膜的工艺条件(修改稿)
Deposition Parameters of RF Sputtered High-Quality ZnO films
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