用PECVD制备高抗腐蚀性能SiNx薄膜的工艺研究
刘瑞文;焦斌斌;欧毅;陈大鹏
用PECVD制备高抗腐蚀性能SiNx薄膜的工艺研究
The study on technology for high corrosion-resistant SiNx thin film deposited by plasma enhanced chemical vapor deposition
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