微波等离子体化学气相沉积方法制备纳米金刚石薄膜
林晨, 李义锋, 张锦文
微波等离子体化学气相沉积方法制备纳米金刚石薄膜
Nanocrystalline diamond film growth by microwave plasma enhanced chemical vapor deposition (MPCVD)
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