磁控溅射本底真空度对制备高锰硅的形貌影响
潘王衡, 张晋敏, 谢杰, 冯磊, 贺腾, 王立, 肖清泉, 谢泉
磁控溅射本底真空度对制备高锰硅的形貌影响
Effect of background vacuum on the morphology of higher manganese silicide prepared by magnetron sputtering
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