
C含量对间隙固溶Cu-C薄膜微结构、硬度及电阻率的影响
付彦鹏, 尚海龙, 马冰洋, 李荣斌, 冉准
C含量对间隙固溶Cu-C薄膜微结构、硬度及电阻率的影响
The effect of C content on microstructure, hardness and resistivity of interstitial solid solution Cu-C thin films
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