银铜双原子MACE法制备多晶硅陷光结构及其性能的研究

郑超凡, 沈鸿烈, 蒲天, 蒋晔, 李玉芳, 唐群涛, 吴斯泰, 陈洁仪, 金磊

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功能材料 ›› 2017, Vol. 48 ›› Issue (1) : 1230-1235. DOI: 10.3969/j.issn.1001-9731.2017.01.042
工艺·技术

银铜双原子MACE法制备多晶硅陷光结构及其性能的研究

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Fabrication and property of anti-reflection structures on multicrystalline silicon by Ag and Cu dually assisted chemical etching

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{{article.zuoZheCn_L}}. {{article.title_cn}}. {{journal.qiKanMingCheng_CN}}. 2017, 48(1): 1230-1235 https://doi.org/10.3969/j.issn.1001-9731.2017.01.042
{{article.zuoZheEn_L}}. {{article.title_en}}. Journal of Functional Materials. 2017, 48(1): 1230-1235 https://doi.org/10.3969/j.issn.1001-9731.2017.01.042

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