氨气还原氮化法制备TiN薄膜及其SERS效应研究

陈颖, 魏恒勇, 董占亮, 卜景龙, 王瑞生, 魏颖娜, 林健

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功能材料 ›› 2016, Vol. 47 ›› Issue (2) : 2197-2200. DOI: 10.3969/j.issn.1001-9731.2016.02.039
工艺·技术

氨气还原氮化法制备TiN薄膜及其SERS效应研究

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Preparation of TiN films via ammonia reduction nitridation process and their SERS effect

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{{article.zuoZheCn_L}}. {{article.title_cn}}. {{journal.qiKanMingCheng_CN}}. 2016, 47(2): 2197-2200 https://doi.org/10.3969/j.issn.1001-9731.2016.02.039
{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(2): 2197-2200 https://doi.org/10.3969/j.issn.1001-9731.2016.02.039

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