Synergistic effect of chelating agent and oxidant on Cu CMP planarization

Synergistic effect of chelating agent and oxidant on Cu CMP planarization

Chen-Qi YAN

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (S2) : 4-0.

Synergistic effect of chelating agent and oxidant on Cu CMP planarization

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