The structure and passivation effect for the c-Si wafer of a-Si:H films with different processing parameters by HWCVD

The structure and passivation effect for the c-Si wafer of a-Si:H films with different processing parameters by HWCVD

Yu-ping He

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (22) : 24-0.

The structure and passivation effect for the c-Si wafer of a-Si:H films with different processing parameters by HWCVD

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