A study on low-temperature growth of AZO thin films by atomic layer deposition

A study on low-temperature growth of AZO thin films by atomic layer deposition

Jia-Heng FENG

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (18) : 13-0.

A study on low-temperature growth of AZO thin films by atomic layer deposition

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