Study on microstructure and mechanical properties of AlN/TiSiN nanomultilayered films

Study on microstructure and mechanical properties of AlN/TiSiN nanomultilayered films

Peng-can CHEN;Wei LI

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (11-复合) : 26-0.

Study on microstructure and mechanical properties of AlN/TiSiN nanomultilayered films

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