A Study of Metallization for PZT Piezoelectric Buzzer Using Magnetron Sputtering Technology

A Study of Metallization for PZT Piezoelectric Buzzer Using Magnetron Sputtering Technology

Mei HE;De-Miao WANG

Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (23) : 15-0.

A Study of Metallization for PZT Piezoelectric Buzzer Using Magnetron Sputtering Technology

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