On study of composition and structure of Ti-O film prepared by reactive magnetron sputtering Using CO2

On study of composition and structure of Ti-O film prepared by reactive magnetron sputtering Using CO2

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Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (20) : 32-0.

On study of composition and structure of Ti-O film prepared by reactive magnetron sputtering Using CO2

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