The Preliminary Investigation of Hydrogen Plasma Assisted Solid Phase Crystallization Polycrystalline Silicon Film

The Preliminary Investigation of Hydrogen Plasma Assisted Solid Phase Crystallization Polycrystalline Silicon Film

Zheng-Peng LIU Juan LI

Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (19) : 5-0.

The Preliminary Investigation of Hydrogen Plasma Assisted Solid Phase Crystallization Polycrystalline Silicon Film

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