Effect of the core size of the core/shell structured PS/SiO2 composite abrasives on oxide-CMP behavior

Effect of the core size of the core/shell structured PS/SiO2 composite abrasives on oxide-CMP behavior

Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (19) : 4-0.

Effect of the core size of the core/shell structured PS/SiO2 composite abrasives on oxide-CMP behavior

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2014, 45(19): 4-0

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉