Effect of electron beam injection on gettering effect of the porous silicon

Effect of electron beam injection on gettering effect of the porous silicon

Xiao-Gang YOU;;Jia-Yang Li ;Su-Xia GUO

Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (08) : 8-0.

Effect of electron beam injection on gettering effect of the porous silicon

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