The Mechanism of Hydrogen Plasma Passivation for Poly-Si Thin Film

The Mechanism of Hydrogen Plasma Passivation for Poly-Si Thin Film

Juan LIZheng-Peng LIU;;;

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Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (07) : 15-0.

The Mechanism of Hydrogen Plasma Passivation for Poly-Si Thin Film

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