The influence of He ion irradiation on the surface hardness of amorphous hydrocarbon film

The influence of He ion irradiation on the surface hardness of amorphous hydrocarbon film

SUN Li;FAN Hong-yu;LI Meng-ke;LIU Dong-ping;YANG De-ming;YANG Qi;NIU Jin-hai

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (S1) : 67-70.

The influence of He ion irradiation on the surface hardness of amorphous hydrocarbon film

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