Study on Characteristics of ITiO films by room temperature depositon and excimer laser annealing

Study on Characteristics of ITiO films by room temperature depositon and excimer laser annealing

Yi SHEN

PDF(1161 KB)

Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (21) : 34-0.

Study on Characteristics of ITiO films by room temperature depositon and excimer laser annealing

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2013, 44(21): 34-0

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(1161 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉