Preparation of Low Resistivity Tantalum Film Deposited by Magnetron Sputtering

Preparation of Low Resistivity Tantalum Film Deposited by Magnetron Sputtering

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (18) : 28-0.

Preparation of Low Resistivity Tantalum Film Deposited by Magnetron Sputtering

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