State-of-arts of vacuum fabrication technology of CIGS thin film and its sputtering target

State-of-arts of vacuum fabrication technology of CIGS thin film and its sputtering target

Leng Zhang

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (14) : 1990-1994.

State-of-arts of vacuum fabrication technology of CIGS thin film and its sputtering target

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