The influence of the preferred orientation of Mo thin films on the sputtering time

The influence of the preferred orientation of Mo thin films on the sputtering time

ZHANG Yan-xia;JI Ya-xin;OU Yu-feng;YAN Yong;LI Sha-sha;LIU Lian;ZHANG Yong;ZHAO Yong;YU Zhou

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (06) : 888-892.

工艺 ·技术

The influence of the preferred orientation of Mo thin films on the sputtering time

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