The growth simulation of Ti thin film onto Si substrate

The growth simulation of Ti thin film onto Si substrate

WU Qing-ying;CHEN Xiao-long;SUN Ling-guang;LUO Shun-zhong;ZHU Jian-guo

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (05) : 727-730.

工艺 ·技术

The growth simulation of Ti thin film onto Si substrate

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