Preparation of single phase semiconducting Mg2Si film on Si substrate by low vacuum heat treatment

Preparation of single phase semiconducting Mg2Si film on Si substrate by low vacuum heat treatment

XIAO Qing-quan;XIE Quan;SHEN Xiang-qian;ZHANG Jin-min;CHEN Qian

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (04) : 585-589.

工艺 ·技术

Preparation of single phase semiconducting Mg2Si film on Si substrate by low vacuum heat treatment

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