Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

SHAN Wei;YAO Man-wen;HU Bao-fu;YANG Peng-fei;YAO Xi

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (04) : 581-584.

工艺 ·技术

Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

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