Microstructure and Thermal Stability of an Ultrathin α-Ta(N)/TaN Bi-layer Diffusion Barrier

Microstructure and Thermal Stability of an Ultrathin α-Ta(N)/TaN Bi-layer Diffusion Barrier

LIU Chun-Hai;CUI Xue-jun;JIN Yong-zhong;YANG Rui-song;WANG Su-juan;YE Song

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (02) : 202-205.

Microstructure and Thermal Stability of an Ultrathin α-Ta(N)/TaN Bi-layer Diffusion Barrier

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