Influence of Nitrogen Flows on Structure and Properties of TiAlN Film Prepared by Mid-frequency Unbalanced Magnetron Sputtering

Influence of Nitrogen Flows on Structure and Properties of TiAlN Film Prepared by Mid-frequency Unbalanced Magnetron Sputtering

;Nai-Ru HE

PDF(3364 KB)

Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (01) : 32-35.

Influence of Nitrogen Flows on Structure and Properties of TiAlN Film Prepared by Mid-frequency Unbalanced Magnetron Sputtering

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2013, 44(01): 32-35

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(3364 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉