Fabrication of transparent conductive ZAO film by DC magnetron sputtering and properties study

Fabrication of transparent conductive ZAO film by DC magnetron sputtering and properties study

CHEN Xiao yan

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (01) : 139-142.

工艺 ·技术

Fabrication of transparent conductive ZAO film by DC magnetron sputtering and properties study

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2013, 44(01): 139-142

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