Effect of rf powers on microstructural characteristics and optical properties of nc-Si:H thin films by RF-PECVD

Effect of rf powers on microstructural characteristics and optical properties of nc-Si:H thin films by RF-PECVD

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (23) : 17-0.

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Effect of rf powers on microstructural characteristics and optical properties of nc-Si:H thin films by RF-PECVD

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2012, 43(23): 17-0

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