Effects of Assistant Gases Composition on the Structure, Properties of Diamond-like Carbon Films

Effects of Assistant Gases Composition on the Structure, Properties of Diamond-like Carbon Films

DAI Haiyang;CHEN Zhenping;CHENG Xuerui

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (12) : 1643-1646.

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Effects of Assistant Gases Composition on the Structure, Properties of Diamond-like Carbon Films

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