Influence of RF sputtering parameter on the structural and electrical properties of AZO thin film

Influence of RF sputtering parameter on the structural and electrical properties of AZO thin film

HUANG Wen;YU Zhou;LIU Lian

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (12) : 1553-1555.

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Influence of RF sputtering parameter on the structural and electrical properties of AZO thin film

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