Effect of sputtering pressure on the surface morphology of the Ge/Si Nanodots

Effect of sputtering pressure on the surface morphology of the Ge/Si Nanodots

xiao-Song YE

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (10) : 4-0.

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Effect of sputtering pressure on the surface morphology of the Ge/Si Nanodots

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