Measurement of Ultra Small Residual Stress in Deep Submicron Thick Films by the Annular Thin Plates

Measurement of Ultra Small Residual Stress in Deep Submicron Thick Films by the Annular Thin Plates

Da-Yong QIAO

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (10) : 15-0.

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Measurement of Ultra Small Residual Stress in Deep Submicron Thick Films by the Annular Thin Plates

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