The microstructure of Si quantum dots multilayers deposited by magnetron sputtering

The microstructure of Si quantum dots multilayers deposited by magnetron sputtering

Zhi-Ming Zhao;Er-Yun Ma;Xiao-Jing Zhang

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (06) : 732-735.

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The microstructure of Si quantum dots multilayers deposited by magnetron sputtering

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