直流溅射工艺参数对Mo薄膜结构及电性能的影响

直流溅射工艺参数对Mo薄膜结构及电性能的影响

Tao Huang;Yong Yan;Zhou Yu

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (04) : 499-503.

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