氢稀释比与衬底温度对硅基薄膜相变及其光电性能影响的研究

氢稀释比与衬底温度对硅基薄膜相变及其光电性能影响的研究

Xiu-Hong Zhu;Guang-Hua Chen;Mao-Sheng Zheng

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (04) : 496-498.

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