Aluminum-induced crystallization and Grain preferred orientation characteristics of polysilicon thin flims

Aluminum-induced crystallization and Grain preferred orientation characteristics of polysilicon thin flims

Wei Yu;Ya-Ping Guo

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (02) : 231-234.

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Aluminum-induced crystallization and Grain preferred orientation characteristics of polysilicon thin flims

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