The low temperature deposited poly-Si thin film by HWCVD quality dependence on substrates

The low temperature deposited poly-Si thin film by HWCVD quality dependence on substrates

ZHANG Lei;SHEN Honglie;HUANG Haibin

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (11) : 1947-1950.

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The low temperature deposited poly-Si thin film by HWCVD quality dependence on substrates

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