紫外辐照对超低介电常数SiCOH薄膜组成与机械性能的影响

紫外辐照对超低介电常数SiCOH薄膜组成与机械性能的影响

FU Shuang;HU Longlong;MENG Qingwei

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (09) : 1657-1659.

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