Research on the Removal Mechanism of Phosphorus from Polysilicon by Vacuum Induction Melting

Research on the Removal Mechanism of Phosphorus from Polysilicon by Vacuum Induction Melting

LUO Dawei;SUN Jinling;ZHANG Shuang

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (09) : 1551-1554.

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Research on the Removal Mechanism of Phosphorus from Polysilicon by Vacuum Induction Melting

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