Effect of process parameters on bonds structure of GeSi films by hot-wire CVD

Effect of process parameters on bonds structure of GeSi films by hot-wire CVD

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Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (10) : 38-0.

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Effect of process parameters on bonds structure of GeSi films by hot-wire CVD

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2010, 41(10): 38-0

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