Growth control on the conduction type of SiC:Al films with MOCVD method

Growth control on the conduction type of SiC:Al films with MOCVD method

Chen Xiao Qing ;;;

Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (07) : 14-0.

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Growth control on the conduction type of SiC:Al films with MOCVD method

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