Research on beta-FeSi2 thin films from Fe/Si multilayers deposited by ion beam sputtering

Research on beta-FeSi2 thin films from Fe/Si multilayers deposited by ion beam sputtering

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Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (05) : 25-0.

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Research on beta-FeSi2 thin films from Fe/Si multilayers deposited by ion beam sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2010, 41(05): 25-0

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