Effect of sputtering power density on structure and properties of IZrO thin films

doi:10.3969/j.issn.1001-9731.2026.09.012

Journal of Functional Materials ›› 2026, Vol. 57 ›› Issue (9) : 86-90. DOI: 10.3969/j.issn.1001-9731.2026.09.012

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Effect of sputtering power density on structure and properties of IZrO thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2026, 57(9): 86-90 https://doi.org/10.3969/j.issn.1001-9731.2026.09.012

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Received	Revised	Published
2026-03-15	2026-05-16	2026-09-30
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2026-10-15

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