Study of the effect of Zr doping on carrier mobility of ITO targets

doi:10.3969/j.issn.1001-9731.2025.11.024

Journal of Functional Materials ›› 2025, Vol. 56 ›› Issue (11) : 11183-11188. DOI: 10.3969/j.issn.1001-9731.2025.11.024

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Study of the effect of Zr doping on carrier mobility of ITO targets

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2025, 56(11): 11183-11188 https://doi.org/10.3969/j.issn.1001-9731.2025.11.024

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Received	Revised	Published
2025-08-03	2025-09-20	2025-11-30
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2025-12-04

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