Properties of B-doped ZnO films deposited by LPCVD

XU Yajun, MA Haoran, WU Jun, SHEN Honglie

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Journal of Functional Materials ›› 2025, Vol. 56 ›› Issue (7) : 7217-7222. DOI: 10.3969/j.issn.1001-9731.2025.07.027
Process & Technology

Properties of B-doped ZnO films deposited by LPCVD

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