Research progress on doping of aluminum nitride films with Group ⅢB elements

doi:10.3969/j.issn.1001-9731.2025.07.006

Journal of Functional Materials ›› 2025, Vol. 56 ›› Issue (7) : 7035-7043. DOI: 10.3969/j.issn.1001-9731.2025.07.006

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Research progress on doping of aluminum nitride films with Group ⅢB elements

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2025, 56(7): 7035-7043 https://doi.org/10.3969/j.issn.1001-9731.2025.07.006

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Received	Revised	Published
2024-11-11	2024-12-12	2025-07-30
Issue Date
2025-08-01

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