Preparation of MoO3 high-transmittance hydrophilic optical films by inductively coupled plasma-enhanced magnetron sputtering
PENG Jingquan, ZHENG Xuejun, FENG Chunyang, LI Fang, HUANG Le, CHEN Li, ZUO Binhuai, CHEN Lijuan, HE Chucai
Jorunal of Functional Materials . 2023, (11): 11118 -11125 .  DOI: 10.3969/j.issn.1001-9731.2023.11.014