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中文
Nanocrystalline diamond film growth by microwave plasma enhanced chemical vapor deposition (MPCVD)
LIN Chen, LI Yifeng, ZHANG Jinwen
Journal of Functional Materials . 2021, (
7
): 7001 -7005 . DOI: 10.3969/j.issn.1001-9731.2021.07.001
