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中文
Effects of yttrium content and thickness on the phase evolution of HfO
2
thin films
YANG Xirui,WANG Xuexia,ZHOU Dayu,XU Jin,YAN Yong,LIANG Hailong
Journal of Functional Materials . 2017, (
10
): 10154 -10158 . DOI: 10.3969/j.issn.1001-9731.2017.10.026
